Real-Time and Atomic-Scale Observation of Local Solid-Phase Epitaxial Growth in Thin Silicon Film

Presentation information

Oral Presentation

10: Thin Film Electronics: Oxide / Non-single Crystalline / Novel Process

[E-2] Advanced Group IV Thin Film Devices and Technologies

Tue. Sep 27, 2022 2:00 PM - 4:00 PM 105 (1F)

Session Chair: Shin-ichiro Kuroki (Hiroshima Univ.), Ryo Matsumura (NIMS)

3:45 PM - 4:00 PM

〇Manabu Tezura¹, Takanori Asano¹, Riichiro Takaishi¹, Mitsuhiro Tomita¹, Masumi Saitoh¹, Hiroki Tanaka¹ (1. KIOXIA Corp. (Japan))

Presentation style: On-site (in-person)

Abstract password authentication.
Password to download abstracts has been informed in the confirmation mail.