Real-Time and Atomic-Scale Observation of Local Solid-Phase Epitaxial Growth in Thin Silicon Film

講演情報

Oral Presentation

10: Thin Film Electronics: Oxide / Non-single Crystalline / Novel Process

[E-2] Advanced Group IV Thin Film Devices and Technologies

2022年9月27日(火) 14:00 〜 16:00 105 (1F)

Session Chair: Shin-ichiro Kuroki (Hiroshima Univ.), Ryo Matsumura (NIMS)

15:45 〜 16:00

〇Manabu Tezura¹, Takanori Asano¹, Riichiro Takaishi¹, Mitsuhiro Tomita¹, Masumi Saitoh¹, Hiroki Tanaka¹ (1. KIOXIA Corp. (Japan))

Presentation style: On-site (in-person)

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