2022 International Conference on Solid State Devices and Materials

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Oral Presentation

10: Thin Film Electronics: Oxide / Non-single Crystalline / Novel Process

[E-3] Oxide Semiconductor TFT

Tue. Sep 27, 2022 4:15 PM - 6:00 PM 105 (1F)

Session Chair: Tsutomu Tezuka (KIOXIA Corp.), Cuan Liu (Sun Yat-sen Univ.)

4:15 PM - 4:45 PM

[E-3-01 (Invited)] Electrical Characteristic and Stability of Indium-Oxide Based Nanosheet Transistor with Different Metal Dopants

〇Po-Tsun Liu1, Zhen-Hao Li1, Tsung-Che Chiang1, Hsin-Hua Lee1, Chun-Hao Tu1 (1. NYCU (Taiwan))

Presentation style: Online

https://doi.org/10.7567/SSDM.2022.E-3-01

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