[No Show] High Performance Ta-Doped β-Ga2O3 MISFET with h-BN Dielectric and Its Carrier Scattering Mechanisms

Xiao-Xi Li

Presentation information

Cancelled

Oral Presentation

10: Thin Film Electronics: Oxide / Non-single Crystalline / Novel Process

[E-3] Oxide Semiconductor TFT

Tue. Sep 27, 2022 4:15 PM - 6:00 PM 105 (1F)

Session Chair: Tsutomu Tezuka (KIOXIA Corp.), Cuan Liu (Sun Yat-sen Univ.)

5:00 PM - 5:15 PM

[E-3-03] [No Show] High Performance Ta-Doped β-Ga₂O₃ MISFET with h-BN Dielectric and Its Carrier Scattering Mechanisms

〇Xiao-Xi Li¹, Yu Sun², Yu-Chun Li¹, Rui Zhang², Chang-Tai Xia³, Ying-Guo Yang¹, Hong-Liang Lu¹ (1. Fudan Univ. (China), 2. Zhejiang Univ. (China), 3. Shanghai Inst. of Opt./Fine Mech., CAS (China))

Presentation style: Online

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Presentation information

[E-3] Oxide Semiconductor TFT

[E-3-03] [No Show] High Performance Ta-Doped β-Ga2O3 MISFET with h-BN Dielectric and Its Carrier Scattering Mechanisms

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[E-3-03] [No Show] High Performance Ta-Doped β-Ga₂O₃ MISFET with h-BN Dielectric and Its Carrier Scattering Mechanisms