2022 International Conference on Solid State Devices and Materials

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Oral Presentation

10: Thin Film Electronics: Oxide / Non-single Crystalline / Novel Process

[E-3] Oxide Semiconductor TFT

Tue. Sep 27, 2022 4:15 PM - 6:00 PM 105 (1F)

Session Chair: Tsutomu Tezuka (KIOXIA Corp.), Cuan Liu (Sun Yat-sen Univ.)

5:30 PM - 5:45 PM

[E-3-05] Atomic Layer Deposited Ultra-Thin Indium Zinc Oxide Channel Thin Film Transistor

Yan-Kui Liang1, 〇Wei-Li Lee1, Jing-Wei Lin1, Sih-Rong Wu1, Tsung-Ying Yang1, Li-Chi Peng1, Tsung-Te Chou2, Chi-Chung Kei2, Edward-Yi Chang1, Chun-Hsiung Lin1 (1. National Yang Ming Chiao Tung University (Taiwan), 2. Taiwan Instrument Research Institute, National Applied Research Laboratories (Taiwan))

Presentation style: On-site (in-person)

https://doi.org/10.7567/SSDM.2022.E-3-05

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