2022 International Conference on Solid State Devices and Materials

Presentation information

Cancelled

Oral Presentation

03: Interconnect / 3D Integrations / MEMS

[E-7] MEMS and Advanced Metallization II

Thu. Sep 29, 2022 9:00 AM - 10:45 AM 105 (1F)

Session Chair: Akinobu Yamaguchi (Univ. of Hyogo), Takeo Minari (NIMS)

9:00 AM - 9:30 AM

[【Cancelled】E-7-01 (Invited)] Strategy of Wafer Bonding Techniques in Commercial MEMS

〇Tadashi Inoue1 (1. MMI Semiconductor Co., Ltd. (Japan))

Presentation style: Online

Abstract password authentication.
Password to download abstracts has been informed in the confirmation mail.

Password