[E-7] MEMS and Advanced Metallization II

[E-7-05 (Late News)] Assessment for Moisture Resistance Reliability of Graphene-Capped Copper Structures by Spectroscopic Ellipsometry

〇Shun Nakajima¹, Yoko Wasai², Kenji Kawahara³, Nataliya Nabatova-Gabain², Hiroki Ago³, Hiroyuki Akinaga⁴, Kazuyoshi Ueno¹ (1. Shibaura Inst. Tech. (Japan), 2. Horiba Techno Service Co. Ltd. (Japan), 3. Kyushu Univ. (Japan), 4. Nat. Inst. Adv. Indus. Sci. Tech. (Japan))

Presentation style: On-site (in-person)

https://doi.org/10.7567/SSDM.2022.E-7-05