[F-8] Memory Devices for New Applications

[F-8-01] Heater Size Dependence of Mismatch in Intermediate States of Mushroom PCM Cells for Analog AI Hardware

〇Jin-Ping Han¹, Arthur R Gasasira², Victor Chan², Yoo-Mi Lee¹, Timothy M Philip², Injo Ok², Iqbal Saraf², Kevin W Brew², Juntao Li², Ning Li¹, Nicole A Saulnier², Sean Teehan², Vijay Narayanan¹ (1. IBM T. J. Watson Res. Center (United States of America), 2. IBM Res. - Albany Nano Tech. (United States of America))

Presentation style: Online

https://doi.org/10.7567/SSDM.2022.F-8-01

We characterized mismatch (MM) behaviors of Ge2Sb2Te5 (GST) based mushroom phase change memory (PCM) cells and explored intermediates states MM by introducing rampup and rampdown pulses to achieve gradual reset and gradual set. We evaluated heater size dependency on device MM figure of merit (FOM) in different PCM states. We found that MM FOM in intermediate states is worse than full set and reset states, smaller heater shows better MM than bigger heater in intermediate states.