2022 International Conference on Solid State Devices and Materials

Presentation information

Oral Presentation

Focus Session 1 (Area1&2&9)

[G-3] Quantum Computing I

Tue. Sep 27, 2022 4:15 PM - 5:45 PM 301 (3F)

Session Chair: Jun Yoneda, Masahiko Ishida (NEC Corp.)

5:30 PM - 5:45 PM

[G-3-05] Electrically-addressable engineering in self-assembled Ge double quantum-dots for CMOS integratable quantum electronic devices

〇Yu Ju Chiu1, I Hsiang Wang1, Pei Wen Li1 (1. National Yang Ming Chiao Tung Univ. (Taiwan))

Presentation style: Online

https://doi.org/10.7567/SSDM.2022.G-3-05

We reported a CMOS approach for fabricating germanium double quantum dots with inter-QD coupling barrier of Si3N4 or Si-fin. Individual QDs and their inter-QD coupling barrier are electrically addressable by individual, well-isolated electrodes through self-organized dielectric layers using spacer and self-assemble technologies. Based on a pre-patterned Si-fin that is designed to serve as coupling barrier, poly-Si source/drain reservoirs self-align with the Si-fin barrier via Si3N4 spacer layers.

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