2022 International Conference on Solid State Devices and Materials

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Oral Presentation

01: Advanced CMOS: Material Fundamentals / Process Science / Device Physics

[G-7] Advanced CMOS: Device Technology

Thu. Sep 29, 2022 9:00 AM - 10:15 AM 301 (3F)

Session Chair: Keisuke Yamamoto (Kyushu Univ.), Anabela Veloso (imec)

9:30 AM - 9:45 AM

[G-7-02] Mobility Enhancement in Extremely-Thin Body (110) SiGe-on-insulator pMOSFETs using Starting Substrates with Thin SiGe Layers

〇Chia-Tsong Chen1, Xueyang Han1, Kasidit Toprasertpong1, Mitsuru Takenaka1, Shinichi Takagi1 (1. Univ. of Tokyo (Japan))

Presentation style: On-site (in-person)

https://doi.org/10.7567/SSDM.2022.G-7-02

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