2022 International Conference on Solid State Devices and Materials

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Oral Presentation

02: Advanced and Emerging Memories / New Applications

[J-10] DRAM, SRAM, and 3D NAND

Thu. Sep 29, 2022 4:00 PM - 5:45 PM 303 (3F)

Session Chair: Norikatsu Takaura (Hitachi, Ltd.), Soichi Sugiura (Micron Technology Inc.)

4:00 PM - 4:15 PM

[J-10-01] Evaluating Pillar Capacitor Profile and Material Property Effects on Advanced DRAM Device Performance

〇Ye Xiao Yu1, Zhong Ming Liu1, Guo Bao Xiong1 (1. Changxin corporate (China))

Presentation style: Online

https://doi.org/10.7567/SSDM.2022.J-10-01

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