2022 International Conference on Solid State Devices and Materials

講演情報

Oral Presentation

03: Interconnect / 3D Integrations / MEMS

[K-6] MEMS and Advanced Metallization I

2022年9月28日(水) 13:30 〜 15:30 304 (3F)

Session Chair: Shigeo Yasuhara (Japan Advanced Chemicals Ltd.), Kenji Shiojima (Univ. of Fukui)

14:30 〜 14:45

[K-6-04 (Late News)] Growth of SiC Thin Film on Various Metal Substrates by CVD Using Vinylsilane

〇Koki Ono1, Takashi Koide1, Yong Jin2, Yuuki Tsutiizu1, Takuhiro Hasegawa1, Shigeo Yasuhara2, Wakana Takeuchi1 (1. Aichi Institute Technology (Japan), 2. Japan Advanced Chemicals Ltd. (Japan))

Presentation style: On-site (in-person)

https://doi.org/10.7567/SSDM.2022.K-6-04

Abstract password authentication.
Password to download abstracts has been informed in the confirmation mail.

パスワード