2022 International Conference on Solid State Devices and Materials

Presentation information

Short Courses

[SC-A] Scaling and monolithic vs. heterogeneous integration for advanced, future technology nodes

Mon. Sep 26, 2022 1:00 PM - 5:30 PM 201 (2F)

Organizer: Anabela Veloso (imec), Masaharu Kobayashi (Univ. of Tokyo)

4:40 PM - 5:30 PM

[SC-A-05] FEOL selective etch processes to enable advanced logic devices: nanosheet, forksheet and complementary FETs

〇Yusuke Oniki1 (1. imec)

Presentation style: On-site (in-person)

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