Synthesis of CuAlO <sub>2</sub>/Si heterostructures by DPDS-assisted LBL approach and their transistor characteristics

MEHDI ALI

doi:https://doi.org/10.7567/SSDM.2023.C-3-04

講演情報

Oral Presentation

10: Thin Film Electronics: Oxide / Non‐single Crystalline / Novel Process

[C-3] Advanced process of oxide semiconductors

2023年9月7日(木) 09:00 〜 10:15 Room C (221, Bldg. 2)

Session Chairs: Keisuke Ide (Tokyo Tech), Kaoru Toko (Univ. of Tsukuba)

10:00 〜 10:15

[C-3-04] Synthesis of CuAlO ₂/Si heterostructures by DPDS-assisted LBL approach and their transistor characteristics

^○MEHDI ALI¹, Daiki Yamashita¹, Hideo Isshiki¹ (1. The University of Electro -Communications, Tokyo- Japan (Japan))

https://doi.org/10.7567/SSDM.2023.C-3-04

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講演情報

[C-3] Advanced process of oxide semiconductors

[C-3-04] Synthesis of CuAlO 2/Si heterostructures by DPDS-assisted LBL approach and their transistor characteristics

パスワード

[C-3-04] Synthesis of CuAlO ₂/Si heterostructures by DPDS-assisted LBL approach and their transistor characteristics