2023 International Conference on Solid State Devices and Materials

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Oral Presentation

02: Advanced and Emerging Memories / New Applications

[E-4] 3D NAND

Thu. Sep 7, 2023 10:45 AM - 12:00 PM Room E (223, Bldg. 2)

Session Chairs: Keiji Hosotani (KIOXIA), Ming-Hsiu Lee (Macronix International Co., Ltd)

10:45 AM - 11:15 AM

[E-4-01 (Invited)] Polysilicon channel in 3-D NAND: Challenges and Strategies for Improvement

○Sivaramakrishnan Ramesh1 (1. imec (Belgium))

https://doi.org/10.7567/SSDM.2023.E-4-01

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