2023 International Conference on Solid State Devices and Materials

Presentation information

Oral Presentation

02: Advanced and Emerging Memories / New Applications

[E-4] 3D NAND

Thu. Sep 7, 2023 10:45 AM - 12:00 PM Room E (223, Bldg. 2)

Session Chairs: Keiji Hosotani (KIOXIA), Ming-Hsiu Lee (Macronix International Co., Ltd)

11:30 AM - 11:45 AM

[E-4-03] The Effect of Crystallinity of Channel Silicon Formed by Two Different Metal Induced Lateral Crystallization (MILC) on Cell Current Distribution in 3D Flash Memory

Haruki Matsuo1, Hiroki Yamashita1, Yusuke Shimada1, Noritaka Ishihara1, Satoshi Seto1, Sho Morita1, Masafumi Ukishima1, Kazuya Uejima1, Yusuke Arayashiki1, Suzuka Kajiwara1, Akiyuki Murayama1, Katsuya Nishiyama1, Kikuko Suhimae1, Shinji Mori1, Yuta Saito1, Takeshi Shundo1, Yurika Kanno1, Hiroyuki Kamiya2, Yasuhiro Uchiyama1, Fumiki Aisou1, Katsuyuki Sekine1, Norio Ohtani1 (1. Kioxia Corp. (Japan), 2. Western Digital Corp. (United States of America))

https://doi.org/10.7567/SSDM.2023.E-4-03

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