2023 International Conference on Solid State Devices and Materials

Presentation information

Oral Presentation

10: Thin Film Electronics: Oxide / Non‐single Crystalline / Novel Process

[E-5] Oxide semiconductor TFTs and technology

Fri. Sep 8, 2023 9:00 AM - 10:15 AM Room E (223, Bldg. 2)

Session Chairs: Juan Paolo Bermundo (NAIST), Jun Koyama (Semiconductor Energy Lab.)

10:00 AM - 10:15 AM

[E-5-05] Variable Photocurrent Method Characterization of Subgap Defects in In 2O 3 TFT

Kuo Zhang1,2, Jiayi Wang1, Yang Xu1, Nannan You1, Qian Zhang1,2, Yu Wang1,2, Shengkai Wang1,2 (1. Inst. of Microelectronics of the Chinese Academy of Sci. (China), 2. Univ. of Chinese Academy of Sci. (China))

https://doi.org/10.7567/SSDM.2023.E-5-05

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