2023 International Conference on Solid State Devices and Materials

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Oral Presentation

10: Thin Film Electronics: Oxide / Non‐single Crystalline / Novel Process

[E-6] Thin films for sensors and gate insulators

Fri. Sep 8, 2023 10:45 AM - 12:00 PM Room E (223, Bldg. 2)

Session Chairs: Mamoru Furuta (Kochi Univ. of Technology), Chih-Yu Chang (TSMC)

11:15 AM - 11:30 AM

[E-6-03] Selenized 2D Film Based Gas Sensor with Self-Convergent Calibration

Che-Chuan Liu1, ○Hsin-Yi Shen1, Kuangye Wang2, Yu-Lun Chueh2, Yue-Der Chih3, Jonathen Chang3, Jiaw-Ren Shih1, Chrong-Jung Lin1, Ya-Chin King1 (1. Microelectronics Laboratory, Institute of Electronics Engineering, National Tsing Hua Univ. (Taiwan), 2. Department of Materials Science and Engineering, National Tsing Hua Univ. (Taiwan), 3. Design and Technology Platform, Taiwan Semiconductor Manufacturing Company (tsmc) (Taiwan))

https://doi.org/10.7567/SSDM.2023.E-6-03

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