Selenized 2D Film Based Gas Sensor with Self-Convergent Calibration

Che-Chuan Liu

doi:https://doi.org/10.7567/SSDM.2023.E-6-03

11:15 〜 11:30

[E-6-03] Selenized 2D Film Based Gas Sensor with Self-Convergent Calibration

Che-Chuan Liu¹, ^○Hsin-Yi Shen¹, Kuangye Wang², Yu-Lun Chueh², Yue-Der Chih³, Jonathen Chang³, Jiaw-Ren Shih¹, Chrong-Jung Lin¹, Ya-Chin King¹ (1. Microelectronics Laboratory, Institute of Electronics Engineering, National Tsing Hua Univ. (Taiwan), 2. Department of Materials Science and Engineering, National Tsing Hua Univ. (Taiwan), 3. Design and Technology Platform, Taiwan Semiconductor Manufacturing Company (tsmc) (Taiwan))

https://doi.org/10.7567/SSDM.2023.E-6-03

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講演情報

[E-6] Thin films for sensors and gate insulators

[E-6-03] Selenized 2D Film Based Gas Sensor with Self-Convergent Calibration

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