2023 International Conference on Solid State Devices and Materials

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Oral Presentation

01: Advanced CMOS: Material Science / Process Engineering / Device Technology

[F-1] Modeling, Simulation and Characterization

Wed. Sep 6, 2023 2:00 PM - 3:45 PM Room F (224, Bldg. 2)

Session Chairs: Satofumi Souma (Kobe Univ.), Hidetoshi Oishi (Sony Semiconductor Solutions Corp.)

2:15 PM - 2:30 PM

[F-1-02] Sub-20nm gate length p-FinFETs device performance improvement using TEM/EDX and NBD based TCAD calibrations.

○Pierre EYBEN1, Pierre De Keersgieter1, Philippe Matagne1, Thomas Chiarella1, Clément Porret1, Andriy Hikavyy1, Yong Kong Siew1, Ludovic Goux1, Jérôme Mitard1, Naoto Horiguchi1 (1. Imec (Belgium))

https://doi.org/10.7567/SSDM.2023.F-1-02

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