2023 International Conference on Solid State Devices and Materials

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Oral Presentation

01: Advanced CMOS: Material Science / Process Engineering / Device Technology

[F-3] Ferroelectric Devices

Thu. Sep 7, 2023 9:00 AM - 10:00 AM Room F (224, Bldg. 2)

Session Chairs: Pin Su (NYCU), Shibun Tsuda (Renesas Electronics Corp.)

9:00 AM - 9:15 AM

[F-3-01] First Demonstration of SiGe/Si Super-Lattice Ferroelectric HfZrO 2 Multibit FinFET for Nonvolatile Memory

○Tsai- Jung Lin1, Yi-Ju Yao1, Ting-Yu Tseng2, Ching-Ru Yang2, Heng-Jia Chang2, Guang-Li Luo3, Fu-Ju Hou3, Yung-Chun Wu2 (1. College of Semiconductor Research, National Tsing Hua University (Taiwan), 2. Department of Engineering and System Science, National Tsing Hua University (Taiwan), 3. Taiwan Semiconductor Research Institute (Taiwan))

https://doi.org/10.7567/SSDM.2023.F-3-01

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