2023 International Conference on Solid State Devices and Materials

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Oral Presentation

01: Advanced CMOS: Material Science / Process Engineering / Device Technology

[F-3] Ferroelectric Devices

Thu. Sep 7, 2023 9:00 AM - 10:00 AM Room F (224, Bldg. 2)

Session Chairs: Pin Su (NYCU), Shibun Tsuda (Renesas Electronics Corp.)

9:15 AM - 9:30 AM

[F-3-02] Reliability Improvement of MFM Capacitors by Ozone Treatment on Bottom TiN Electrode

○Haoji Qian1, Rongzong Shen1, Jiajia Chen1, Gaobo Lin1, Minglei Ma2, Jiacheng Xu1, Chengji Jin1, Yan Liu2, Xiao Yu1, Genquan Han2 (1. Zhejiang Lab. (China), 2. Xidian University (China))

https://doi.org/10.7567/SSDM.2023.F-3-02

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