2023 International Conference on Solid State Devices and Materials

講演情報

Oral Presentation

01: Advanced CMOS: Material Science / Process Engineering / Device Technology

[F-3] Ferroelectric Devices

2023年9月7日(木) 09:00 〜 10:00 Room F (224, Bldg. 2)

Session Chairs: Pin Su (NYCU), Shibun Tsuda (Renesas Electronics Corp.)

09:15 〜 09:30

[F-3-02] Reliability Improvement of MFM Capacitors by Ozone Treatment on Bottom TiN Electrode

Haoji Qian1, Rongzong Shen1, Jiajia Chen1, Gaobo Lin1, Minglei Ma2, Jiacheng Xu1, Chengji Jin1, Yan Liu2, Xiao Yu1, Genquan Han2 (1. Zhejiang Lab. (China), 2. Xidian University (China))

https://doi.org/10.7567/SSDM.2023.F-3-02

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