2023 International Conference on Solid State Devices and Materials

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01: Advanced CMOS: Material Science / Process Engineering / Device Technology

[F-5] Advanced CMOS: Process Technology

Fri. Sep 8, 2023 9:00 AM - 10:15 AM Room F (224, Bldg. 2)

Session Chairs: Genji Nakamura (Tokyo Electron Ltd.), Takashi Matsukawa (AIST)

9:30 AM - 9:45 AM

[F-5-02] Crystallinity and Composition of Sc / Si:P System for Advanced Contact Applications

○Bert Pollefliet1,2, Clement Porret2, Jean-Luc Everaert2, Kiroubanand Sankaran2, Xiaoyu Piao2, Erik Rosseel2, Thierry Conard2, Andrea Impagnatiello2, Yosuke Shimura2, Andriy Hikavyy2, Roger Loo2, André Vantomme1, Clement Merckling1,2 (1. KU Leuven (Belgium), 2. imec (Belgium))

https://doi.org/10.7567/SSDM.2023.F-5-02

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