2023 International Conference on Solid State Devices and Materials

Presentation information

Oral Presentation

01: Advanced CMOS: Material Science / Process Engineering / Device Technology

[F-7] Advanced CMOS: Device Technology 1

Fri. Sep 8, 2023 1:30 PM - 3:15 PM Room F (224, Bldg. 2)

Session Chairs: Anabela Veloso (imec), Seungkwon Kim (Samsung Electronics)

2:00 PM - 2:15 PM

[F-7-02] Epi Source/Drain Damage Mitigation with Inner Spacer and Buffer Optimization in Stacked Nanosheet Gate-All-Around Transistors

Curtis S Durfee1, Ivo Otto2, Subhadeep Kal2, Shanti Pancharatnam1, Matthew Flaugh2, Toshiki Kanaki2, Matthew Rednor2, Huimei Zhou1, Liqiao Qin1, Juntao Li1, Luciana Meli1, Nicolas Loubet1, Peter Biolsi2, Nelson Felix1 (1. IBM (United States of America), 2. TEL (United States of America))

https://doi.org/10.7567/SSDM.2023.F-7-02

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