2023 International Conference on Solid State Devices and Materials

講演情報

Oral Presentation

01: Advanced CMOS: Material Science / Process Engineering / Device Technology

[F-7] Advanced CMOS: Device Technology 1

2023年9月8日(金) 13:30 〜 15:15 Room F (224, Bldg. 2)

Session Chairs: Anabela Veloso (imec), Seungkwon Kim (Samsung Electronics)

14:15 〜 14:30

[F-7-03] Ferroelectric Hf 0.5Zr 0.5O 2 Omega FET and CMOS Inverter with SiGe/Si Super-Lattice channel

Yi- Ju Yao1, Ting-Yu Tseng2, Ching-Ru Yang2, Tsai-Jung Lin1, Heng-Jia Chang2, Guang-Li Luo3, Fu-Ju Hou3, Yung-Chun Wu2 (1. College of Semiconductor Research, National Tsing Hua University (Taiwan), 2. Department of Engineering and System Science, National Tsing Hua University (Taiwan), 3. Taiwan Semiconductor Research Institute (Taiwan))

https://doi.org/10.7567/SSDM.2023.F-7-03

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