Design Technique of Serpentine Spring with Half Edge Span Beam Length for High Sensitivity Gold Proof-mass MEMS Capacitive Accelerometer

Kisuke Miyado

doi:https://doi.org/10.7567/SSDM.2023.G-2-02

4:30 PM - 4:45 PM

[G-2-02] Design Technique of Serpentine Spring with Half Edge Span Beam Length for High Sensitivity Gold Proof-mass MEMS Capacitive Accelerometer

^○Kisuke Miyado¹, Tenneti Devi Srujana¹, Akira Onishi¹, Katsuyuki Machida¹, Tomoyuki Kurioka¹, Parthojit Chakraborty¹, Tso-Fu Mark Chang¹, Masato Sone¹, Yoshihiro Miyake¹, Hiroyuki Ito¹ (1. Tokyo Institute of Technology (Japan))

https://doi.org/10.7567/SSDM.2023.G-2-02

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Presentation information

[G-2] MEMS and Advanced Metallization I

[G-2-02] Design Technique of Serpentine Spring with Half Edge Span Beam Length for High Sensitivity Gold Proof-mass MEMS Capacitive Accelerometer

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