2023 International Conference on Solid State Devices and Materials

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Oral Presentation

11: Advanced Materials: Synthesis / Crystal Growth / Characterization

[M-3] Group IV Materials I

Thu. Sep 7, 2023 9:00 AM - 10:30 AM Room M (431, Bldg. 4)

Session Chairs: Katsunori Makihara (Nagoya Univ.), Yosuke Shimura (imec)

9:30 AM - 9:45 AM

[M-3-02] Influence of Strain on Multilayer Ge Nanodot Formation on SiGe Virtual Substrate

○Wei-Chen Wen1, Bernd Tillack1,2, Yuji Yamamoto1 (1. IHP - Leibniz-Institut für innovative Mikroelektronik (Germany), 2. Technische Universität Berlin (Germany))

https://doi.org/10.7567/SSDM.2023.M-3-02

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