Formation of One-Dimensionally Self-Aligned Si-QDs and Their Local Electron Charging Properties

Yuki Imai

doi:https://doi.org/10.7567/SSDM.2023.M-3-04

10:00 AM - 10:15 AM

[M-3-04] Formation of One-Dimensionally Self-Aligned Si-QDs and Their Local Electron Charging Properties

^○Yuki Imai¹, Katsunori Makihara¹, Yuji Yamamoto², Wei-Chen Wen², Markus Andreas Schubert², Johgeun Baek¹, Ryoya Tsuji¹, Noriyuki Taoka³, Akio Ohta⁴, Seiichi Miyazaki¹ (1. Nagoya Univ. (Japan), 2. IHP (Germany), 3. Aichi Inst. of Tech. (Japan), 4. Fukuoka Univ. (Japan))

https://doi.org/10.7567/SSDM.2023.M-3-04

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Presentation information

[M-3] Group IV Materials I

[M-3-04] Formation of One-Dimensionally Self-Aligned Si-QDs and Their Local Electron Charging Properties

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