Various Metal Contacts on Polycrystalline Ge with Amorphous Interlayer Formed by ZrN Sputter-Deposition

Kenta Moto

doi:https://doi.org/10.7567/SSDM.2023.M-4-04

講演情報

Oral Presentation

11: Advanced Materials: Synthesis / Crystal Growth / Characterization

[M-4] Group IV Materials II

2023年9月7日(木) 10:45 〜 12:00 Room M (431, Bldg. 4)

Session Chairs: Akira Heya (Univ. of Hyogo), Taizoh Sadoh (Kyushu Univ.)

11:30 〜 11:45

[M-4-04] Various Metal Contacts on Polycrystalline Ge with Amorphous Interlayer Formed by ZrN Sputter-Deposition

^○Kenta Moto¹, Kaoru Toko², Tomonari Takayama¹, Takamitsu Ishiyama², Keisuke Yamamoto¹ (1. Kyushu Univ. (Japan), 2. Univ. of Tsukuba (Japan))

https://doi.org/10.7567/SSDM.2023.M-4-04

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講演情報

[M-4] Group IV Materials II

[M-4-04] Various Metal Contacts on Polycrystalline Ge with Amorphous Interlayer Formed by ZrN Sputter-Deposition

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