[PS-10] 10: Thin Film Electronics: Oxide / Non‐single Crystalline / Novel Process

[PS-10-05] Characterization of Metal/IGZO Contact with Back-to-Back Schottky Diode

^○Shujuan Mao¹, Jianfeng Gao², Weibing Liu², Yanping He², Xu Chen², Gaobo Xu², Jinbiao Liu², Junfeng Li², Jun Luo², Jing Zhang¹, Yuke Li¹, Xiangsheng Wang¹, Wei Yu¹, Chao Tian¹, Hongbo Sun¹, Jinjuan Xiang¹, Guilei Wang¹, Chao Zhao¹ (1. Beijing Superstring Academy of Memory Technology (China), 2. Institute of Microelectronics, Chinese Academy of Sciences (China))

https://doi.org/10.7567/SSDM.2023.PS-10-05