2023 International Conference on Solid State Devices and Materials

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Poster Session

11: Advanced Materials: Synthesis / Crystal Growth / Characterization

[PS-11] 11: Advanced Materials: Synthesis / Crystal Growth / Characterization

Thu. Sep 7, 2023 3:00 PM - 5:00 PM Shirotori Hall (Nagoya Congress Center)

[PS-11-07] Formation of Micron-Thick Ge by Trench-Filling Epitaxy Using a Patterned (001) Si Substrate with a <100>-Oriented Trench Array

○Takumi Maeda1, Kota Kato1, Jose A. Piedra-Lorenzana1, Takeshi Hizawa1, Tetsuya Nakai2, Yasuhiko Ishikawa1 (1. Toyohashi Univ. of Tech. (Japan), 2. SUMCO Corp. (Japan))

https://doi.org/10.7567/SSDM.2023.PS-11-07

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