2023 International Conference on Solid State Devices and Materials

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Poster Session

11: Advanced Materials: Synthesis / Crystal Growth / Characterization

[PS-11] 11: Advanced Materials: Synthesis / Crystal Growth / Characterization

Thu. Sep 7, 2023 3:00 PM - 5:00 PM Shirotori Hall (Nagoya Congress Center)

[PS-11-09] Ultra-High Concentration Doping by Excimer Laser Annealing Using Solid-Diffusion Source

○Ren Aoki1, Keita Katayama1, Daisuke Nakamura1, Hisato Yabuta1, Hiroshi Ikenoue1, Taizoh Sadoh1 (1. Kyushu Univ. (Japan))

https://doi.org/10.7567/SSDM.2023.PS-11-09

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