Using a CMOS MEMS Resonator System for Rapid Calibration of Thin Film Deposition Thickness

Cheng-Yang Chang

doi:https://doi.org/10.7567/SSDM.2023.PS-3-02

[PS-3-02] Using a CMOS MEMS Resonator System for Rapid Calibration of Thin Film Deposition Thickness

^○Cheng-Yang Chang¹, Chin-Te Hsin¹, Ying-Zong Juang¹, Sheng-Hsiang Tseng¹ (1. National Applied Research Laboratories Taiwan Semiconductor Research Institute (Taiwan))

https://doi.org/10.7567/SSDM.2023.PS-3-02

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Presentation information

[PS-3] 03: Interconnect / 3D Integrations / MEMS

[PS-3-02] Using a CMOS MEMS Resonator System for Rapid Calibration of Thin Film Deposition Thickness

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