2023 International Conference on Solid State Devices and Materials

講演情報

Short Course

[SC-A] Short Course A
Leading-edge CMOS Technology for 2nm-node and beyond

2023年9月5日(火) 13:00 〜 17:45 Room F (224, Bldg. 2)

Organizer: Meishoku Masahara (AIST)
Chair: Toshifumi Irisawa (AIST)

14:30 〜 15:15

[SC-A-03] Advanced Technologies for Extending EUV Lithography

〇Seiji Nagahara1 (1. Tokyo Electron Ltd.)

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