2023 International Conference on Solid State Devices and Materials

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Short Course

[SC-B] Short Course B
Plasma technology: Cornerstone of the post-scaling and next milestone of assurance energy and environment

Tue. Sep 5, 2023 1:00 PM - 5:00 PM Room K (234, Bldg. 2)

Organizer: Kenji Ishikawa (Nagoya Univ.)
Chair: Masanori Terahara (Western Digital)

4:15 PM - 5:00 PM

[SC-B-05] Prospect of dry etching technology for 3D･Chiplet integration

〇Yasuhiro Morikawa1 (1. ULVAC, Inc.)

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