2023 International Conference on Solid State Devices and Materials

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Short Oral Presentation

01: Advanced CMOS: Material Science / Process Engineering / Device Technology

[SO-PS-01] 01: Advanced CMOS: Material Science / Process Engineering / Device Technology

Thu. Sep 7, 2023 1:30 PM - 2:00 PM Room F (224, Bldg. 2)

Session Chairs: Hidetoshi Oishi (Sony Semiconductor Solutions Corp.), Keisuke Yamamoto (Kyushu Univ)

1:30 PM - 1:32 PM

[SO-PS-01-01] Amorphous Si-rich Mo silicide films for advanced source/drain contacts

○Naoya Okada1, Noriyuki Uchida1, Toshihiko Kanayama1 (1. AIST (Japan))

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