2023 International Conference on Solid State Devices and Materials

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Short Oral Presentation

01: Advanced CMOS: Material Science / Process Engineering / Device Technology

[SO-PS-01] 01: Advanced CMOS: Material Science / Process Engineering / Device Technology

Thu. Sep 7, 2023 1:30 PM - 2:00 PM Room F (224, Bldg. 2)

Session Chairs: Hidetoshi Oishi (Sony Semiconductor Solutions Corp.), Keisuke Yamamoto (Kyushu Univ)

1:48 PM - 1:50 PM

[SO-PS-01-10] Comparative Study of Radiation Damage Effects on FinFET and GAAFET

○Ching-Hung Chang1, Kuei-Shu Chang-Liao1, Dun-Bao Ruan2 (1. National Tsing Hua University (Taiwan), 2. Fuzhou University (China))

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