Using a CMOS MEMS Resonator System for Rapid Calibration of Thin Film Deposition Thickness

Cheng-Yang Chang

Presentation information

Short Oral Presentation

03: Interconnect / 3D Integrations / MEMS

[SO-PS-03] 03: Interconnect / 3D Integrations / MEMS

Thu. Sep 7, 2023 1:30 PM - 1:46 PM Room G (231, Bldg. 2)

Session Chairs: Kenji Shiojima (Univ. of Fukui), Takeo Minari (NIMS)

1:32 PM - 1:34 PM

[SO-PS-03-02] Using a CMOS MEMS Resonator System for Rapid Calibration of Thin Film Deposition Thickness

^○Cheng-Yang Chang¹, Chin-Te Hsin¹, Ying-Zong Juang¹, Sheng-Hsiang Tseng¹ (1. National Applied Research Laboratories Taiwan Semiconductor Research Institute (Taiwan))

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Presentation information

[SO-PS-03] 03: Interconnect / 3D Integrations / MEMS

[SO-PS-03-02] Using a CMOS MEMS Resonator System for Rapid Calibration of Thin Film Deposition Thickness

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