10:05 〜 10:20
[AMD4-5L] Improving Performances of Oxide Phototransistors Using a Mechano-Chemically Treated Porous Structure as The Visible Light Absorption Layer
Oxide TFT, Photosensor, Visible light, Mechano-chemical treatment
In this research, we suggest indium gallium zinc oxide (IGZO) thin film transistors (TFTs) for detection of visible light using a porous oxide layer (POL) resulting from mechano-chemical treatment. When compared with conventional IGZO TFT, the IGZO TFT with the POL exhibits photoresponsivity of 341.32 A/W, photosensitivity of 1.10ⅹ106, and detectivity of 4.54ⅹ1010 Jones under 532 nm light illumination.