14:30 〜 17:00
[AMDp2-14L] E/E Inverter Using Four-Terminal Poly-GexSn1-x TFTs on Glass
TFT, 4T, poly-GeSn, Cu-MIC, E/E inverter
We demonstrated an E/E inverter using polycrystalline germanium-tin (poly-GexSn1-x) thin-film transistors (TFTs) fabricated via metal-induced crystallization (MIC) using Cu. The TFTs in the E/E inverter comprises a planar four-terminal (4T) structure, in which the TFTs were enabled to be normally-off by the control gate voltage (VCG). The inverter performance was varied by changing VCG.