International Display Workshops General Incorporated Association

11:55 〜 12:15

[FLX4-4] Polysilicon CMOS TFTs on Ultrathin and Flexible Stainless Steel Substrates

*Miki Trifunovic1, Aditi Chandra1, Mao Ito1, Sarah Khoo1, Arvind Kamath1 (1. Thin Film Electronics Inc. (United States of America))

Polysilicon TFT, CMOS, Ultrathin, Flexible, Stainless Steel

https://doi.org/10.36463/idw.2019.1606

CMOS polysilicon TFTs fabricated on flexible stainless steel substrates are thinned down to 5 µm thickness. Bending tests show minimal change in TFT performance at 2.5 mm bending radius after 10,000 tensile bend cycles.