International Display Workshops General Incorporated Association

15:20 〜 15:40

[MEET6-3] High brightness vertically aligned carbon nanotube (CNT) cold cathode for electron microscope

*Ha Rim Lee1, Boklae Cho2, Kyu Chang Park1 (1. KyungHee University(Korea), 2. Korea Research Institute for Science and Standard(Korea))

Carbon nanotube (CNT), Cold Cathode, high brightness

https://doi.org/10.36463/idw.2020.0823

We developed a high-brightness carbon nanotube (CNT) cold cathode and its studied structural analysis and electron emission characteristics. Based on structural properties, there is a difference in electron emission characteristics, which in turn affects the brightness of the beam. The correlation between the CNT cold cathode structure and its brightness was established, and an optimized electron beam module was designed for secondary electron microscopic imaging