International Display Workshops General Incorporated Association

Proceedings of the International Display Workshops Volume 28 (IDW '21)

Proceedings of the International Display Workshops Volume 28 (IDW '21)

Dec 1, 2021 - Dec 3, 2021
Virtual Conference

[FMC7/AIS9-4] High Resolution Array Tester for Flat Panel Display Using Proximity Capacitance Image Sensor

FMC Workshop

*Toshiro Yasuda1, Kazuhisa Kobayashi1, Yuichi Yamamoto1, Hiroshi Hamori1, Akinobu Teramoto2, Rihito Kuroda3, Shigetoshi Sugawa3 (1.OHT Inc. (Japan), 2.Hiroshima University (Japan), 3.Tohoku University (Japan))

Array Tester, Defect Inspection, LCD, AMOLED, Proximity Capacitance Image Sensor

https://doi.org/10.36463/idw.2021.0258

An array tester technology using a proximity capacitance image sensor with high resolution and high speed performance identifying electrically positions and types of defects on flat panel substrates are discussed. Some results of defects on lines and pixel-electrodes on LCD and Mini-LED panels using the array tester are demonstrated.