[AMDp1-1] Electric Field Thermopower Modulation Analyses of Effective Channel Thickness of Amorphous InGaO3(ZnO)m Thin Film Transistors
Thermopower modulation, Amorphous InGaO3(ZnO)m, Effective channel thickness
Here, we analyzed the transistor characteristics of amorphous InGaO3(ZnO)m thin film transistors (TFTs) by the electric field thermopower modulation and found that the effective channel thickness of the TFTs varies from ~2 nm to ~28 nm depending on the m-value.