[AMDp1-5] Ar Plasma Treatment for Highly Stable n+ region of
Self-Aligned Coplanar IGZO TFT
InGaZnO (IGZO), Ar plasma treatment, self-aligned coplanar
Self-aligned coplanar (SAC) IGZO TFT structure, which has the advantage of a low resistant capacitance (RC) delay, requires highly conductive n+ regions which can be realized by plasma treatment. We optimized Ar plasma treatment process conditions to maintain stable n+ regions and demonstrated SAC IGZO TFT.