International Display Workshops General Incorporated Association

[AMDp1-5] Ar Plasma Treatment for Highly Stable n+ region of
Self-Aligned Coplanar IGZO TFT

*Jinkyu Lee1、Yuseong Jang1、Soo-Yeon Lee1 (1.Seoul National University (Korea))

InGaZnO (IGZO), Ar plasma treatment, self-aligned coplanar

https://doi.org/10.36463/idw.2022.0213

Self-aligned coplanar (SAC) IGZO TFT structure, which has the advantage of a low resistant capacitance (RC) delay, requires highly conductive n+ regions which can be realized by plasma treatment. We optimized Ar plasma treatment process conditions to maintain stable n+ regions and demonstrated SAC IGZO TFT.