International Display Workshops General Incorporated Association

[FMCp3-2] the novel Technology Development of 7Mask for LTPS-LCD

*Dandan Yan1、Xuexin Lan1、Bingping Liu1、Yanshan Huang1、Xiaoxiao Wu1、Xiangkang Wei1、Honghong Nie1、 Keshi Yang1、Chao Deng1、Guozhao Chen1、Xianyan Yang1 (1.Xiamen Tianma Microelectronics Co. (China))

7mask, M2 Taper, PV1 Cracks, Thorn-like Residue

https://doi.org/10.36463/idw.2022.0350

Liquid Crystal Display with 7mask was developed and fabricated successfully for production. We found and solved three key questions, which include the M2 taper, the short circuit of M2 and the thorn-like residue in PV1 and PV2 hole.