the novel Technology Development of 7Mask for LTPS-LCD

Dandan Yan, Xuexin Lan, Bingping Liu, Yanshan Huang, Xiaoxiao Wu, Xiangkang Wei, Honghong Nie,  Keshi Yang, Chao Deng, Guozhao Chen, Xianyan Yang

doi:https://doi.org/10.36463/idw.2022.0350

[FMCp3-2] the novel Technology Development of 7Mask for LTPS-LCD

*Dandan Yan¹, Xuexin Lan¹, Bingping Liu¹, Yanshan Huang¹, Xiaoxiao Wu¹, Xiangkang Wei¹, Honghong Nie¹, Keshi Yang¹, Chao Deng¹, Guozhao Chen¹, Xianyan Yang¹ (1.Xiamen Tianma Microelectronics Co. (China))

7mask, M2 Taper, PV1 Cracks, Thorn-like Residue

https://doi.org/10.36463/idw.2022.0350

Liquid Crystal Display with 7mask was developed and fabricated successfully for production. We found and solved three key questions, which include the M2 taper, the short circuit of M2 and the thorn-like residue in PV1 and PV2 hole.

Proceedings of the International Display Workshops Volume 29 (IDW '22)

[FMCp3-2] the novel Technology Development of 7Mask for LTPS-LCD