11:00 〜 11:20
[MEET4-3 (Invited)] High Throughput Elastomer Stamp Mass Transfer for High Performance Displays
Mass Transfer , MicroLED, MicroIC, Elastomer Stamp
Efforts to develop microLED displays brought visibility to the importance of mass transfer. Processes compatible with high-volume manufacturing that rapidly integrate billions of micron-scale devices are required for making microLED displays. Device assembly throughput greater than 200M units per hour is demonstrated using a 750 × 750 device array stamp and a ten second stamping cycle time.